Hybrid siloxane-oxide systems were prepared by sol-gel techniques. Siloxane precursors are either monomeric species, dimethyldiethoxysilane, or OH-terminated polydimethylsiloxanes. The oxide component is introduced via metallic alkoxides, M(OR)n (M=Si, Ti, Zr). Transparent materials from flexible to brittle gels, can be obtained over a large M/siloxane range. The structure of the various systems was investigated by 29Si MAS-NMR. The signals due to the difunctional Si units, (CH3)2SiO, depend strongly on the nature of M and on the M/siloxane ratio. Structural models are proposed, ranging from single phase systems with highly interconnected siloxane and oxide units, to nanocomposites made of polysiloxane chains crosslinked with oxide-based particles.