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Improvement of Tribological Properties of Mosa Films by Forming Interlayers and/ or Bombarding with Ions

Published online by Cambridge University Press:  22 February 2011

Akihiko Matsui  and
Yoshimi Kagimoto
Akihiko Matsui
Affiliation:
Mitsubishi Heavy industries LTD., Nagasaki R&D Center, 1–1, Akunoura-machi, Nagasaki 850–91, Japan
Yoshimi Kagimoto
Affiliation:
Mitsubishi Heavy industries LTD., Nagasaki R&D Center, 1–1, Akunoura-machi, Nagasaki 850–91, Japan
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Abstract

The effects of forming interlayers and/or bombarding with ions on the tribological properties of the sputter-deposited MoS2 films were investigated. The MoS2 films on substrates of Ti-alloy, martensitic stainless steel and high speed tool steel with TIN interlayers were evaluated by ball/disk sliding tests under ultra-high vacuum condition. Furthermore, nitrogen- or sulfer-ion-bombarded MoS2 films tested too. The test results showed correlation between the surface hardness of substrates and the wear life of MoS2 films. The wear life of the ion-bombarded MoS2 films was improved by mixing film/substrate interface.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 239: Symposium D – Thin Films: Stresses and Mechanical Properties III , 1991 , 605
Copyright
Copyright © Materials Research Society 1992

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References

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