Hostname: page-component-cb9f654ff-h4f6x Total loading time: 0 Render date: 2025-08-28T06:56:25.564Z Has data issue: false hasContentIssue false
  • English
  • Français

Vacuum microelectronics devices based on the controlled electron motion in electric andmagnetic fields

Published online by Cambridge University Press:  15 April 2000

D. Nicolaescu  and
V. Filip
D. Nicolaescu*
Affiliation:
Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, Ibaraki 305-8568, Japan
V. Filip
Affiliation:
Nagoya Institute of Technology, Department of Environmental Technology Gokiso-cho, Showa-ku, Nagoya 466, Japan
*
ndan@etl.go.jp
Get access

Abstract

Several novel field emission devices are analyzed in a unitary way. The devicesinvolve the use of field emitter arrays in a special configuration where the emittedelectrons are subject to crossed electric and magnetic fields. Due to the acting electricand (magnetic) Lorentz forces, the electrons are either deviated or have a cycloid-likeconfined motion. The angular deviation of the electron trajectory can be used for measuringmagnetic fields. The pulsed electron current produced by a cold cathode can be used togenerate electromagnetic radiation. Because the electrons have a confined motion with a longtrajectory length, their chance of hitting a residual gas molecule is increased. They caneither excite gas molecules, which in turn emit UV-radiation when relaxing back to thestable state, or ionize them, the ionic current being correlated with the gas pressure.Accordingly, devices for generating UV-radiation and vacuum gauges can be devised.Furthermore, if the ion generation takes place in a narrow and well-defined region, thentheir angular deviation can be correlated with their mass. A mass spectrometer (withminiaturized dimensions and field emission electron source) can be devised on thisprinciple.

Keywords

Information

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 10 , Issue 1 , April 2000 , pp. 33 - 42
Copyright
© EDP Sciences, 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

Proc. of the International Vacuum Microelectronics Conferences: selected articles published in J. Vac. Sci. and Technol. B 11(2) (1993); J. Vac. Sci. and Technol. B 12(2) (1994); J. Vac. Sci. and Technol. B 13(2) (1995); J. Vac. Sci. and Technol. B 14(3) (1996); J. Vac. Sci. and Technol. B 15(2) (1997); J. Vac. Sci. and Technol. B 16(2) (1998); J. Vac. Sci. and Technol. B 17(2) (1999).
Baptist, R., Vide Sci. Tech. Appl. (France) 52, 499 (1996).
D. Nicolaescu, V. Filip, Appl. Surf. Sci. 94/95, 87 (1996).
Filip, V., Nicolaescu, D., Okuyama, F., Appl. Surf. Sci. 111, 185 (1997). CrossRef
Nicolaescu, D., Filip, V. , Okuyama, F., J. Vac. Sci. Technol. A 16, 2885 (1998). CrossRef
Nicolaescu, D., Filip, V. , Okuyama, F., Appl. Surf. Sci. Part II 126, 292 (1998). CrossRef
Nicolaescu, D., Filip, V., Okuyama, F., Ultramicroscopy 73, 129 (1998). CrossRef
Nicolaescu, D., Filip, V., Itoh, J., Okuyama, F., Appl. Surf. Sci. 146, 217 (1999). CrossRef
Beck, A.H., Brisbane, A.D., Vacuum 11, 137 (1952). CrossRef
Kesling, W.D., Hunt, Ch.E., J. Vac. Sci. and Technol. B 11, 518 (1993). CrossRef
J.D. Jackson, Classical Electrodynamics (Wiley, New York, 1962).
FORTRAN Scientific Subroutine Library Version 2.0 / Peerless Engineering Service (Wiley, New York, USA, 1989).
Laferty, J.M., J. Vac. Sci. and Technol. 9, 101 (1971). CrossRef
E. Nasser, Fundamentals of Gaseous Ionization and Plasma Electronics (Wiley-Interscience, New York, USA, 1971).
A.V. Phelps, L.C. Pitchford, Anisotropic scattering of electrons by N2 and its effects on electron transport: tabulation of cross section and results, JILA Information Center Report No. 26, University of Colorado, Boulder, Colorado, 1985.
Roumenin, Ch.S., Sens. and Actuators A 24, 83 (1990). CrossRef
Spindt, C.A., Holland, C.E., Rosengreen, A., Brodie, I., J. Vac. Sci. and Technol. B 11, 468 (1993). CrossRef