Published online by Cambridge University Press: 15 January 2000
The study concerns remote controlled sensors, associating micro-mechanical and microwave data communicationfunctions. A radio link can be used to transmit information from the sensor as well as to provide internalpower supply. Applications include Wireless Sensor Networks projects. An important operation is performedthrough a passive microwave frequency shifter used for retransmission. Two structures of this frequencyshifter using silicon membrane micro-mechanical capacitors are described, with further details concerning the optimisation of the dimensions using electro-mechanical modellisation, the problems in technologicalsilicon implantation, and some first experimental results.
This subject was presented atC21’98 at Cachan the November 18-19, 1998.