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Analysis of particulates generated in a radiofrequencymethane plasma by laser light scattering and optical spectroscopy

Published online by Cambridge University Press:  15 October 1999

I. Géraud-Grenier ,
V. Massereau-Guilbaud  and
A. Plain
I. Géraud-Grenier*
Affiliation:
LASEP, Faculté des Sciences, Université d'Orléans, site de Bourges, rue G. Berger, B.P. 4043, 18028 Bourges Cedex, France
V. Massereau-Guilbaud
Affiliation:
LASEP, Faculté des Sciences, Université d'Orléans, site de Bourges, rue G. Berger, B.P. 4043, 18028 Bourges Cedex, France
A. Plain
Affiliation:
LASEP, Faculté des Sciences, Université d'Orléans, site de Bourges, rue G. Berger, B.P. 4043, 18028 Bourges Cedex, France
*
Isabelle.Geraud@bourges.univ-orleans.fr
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Abstract

The generation and the behavior of amorphous hydrogenated carbonparticulates have been investigated in a pure methane low pressureradiofrequency discharge at 13.56 MHz. In the plasma, theformation and the presence of two kinds of particulateshave been evidenced by use of laser light scattering. The studyof the different forces acting on the particulates allowed us tounderstand their behavior in the discharge. Optical emission measurements have enabled us to correlate theevolutions of the emission lines (CH, Hα and H2)with the growth of amorphous hydrogenated carbon particulates andalso with the results obtained by laser light scattering. Theparticulate sizes have been measured and aparticulate number density of about 3.0 × 106 cm−3 has been determined.

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Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 8 , Issue 1 , October 1999 , pp. 53 - 59
Copyright
© EDP Sciences, 1999

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