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Working principle description of the wireless passive EM transduction pressure sensor

Published online by Cambridge University Press:  28 September 2011

M.M. Jatlaoui ,
F. Chebila ,
P. Pons  and
H. Aubert
M.M. Jatlaoui*
Affiliation:
CNRS-LAAS, 7 avenue du Colonel Roche, 31077 Toulouse, France
F. Chebila
Affiliation:
CNRS-LAAS, 7 avenue du Colonel Roche, 31077 Toulouse, France University of Toulouse, UPS, INSA, INP, ISAE, LAAS, 31077 Toulouse, France
P. Pons
Affiliation:
CNRS-LAAS, 7 avenue du Colonel Roche, 31077 Toulouse, France
H. Aubert
Affiliation:
CNRS-LAAS, 7 avenue du Colonel Roche, 31077 Toulouse, France University of Toulouse, UPS, INSA, INP, ISAE, LAAS, 31077 Toulouse, France
*
ae-mail: mjatlaou@laas.fr
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Abstract

The development of a new passive wireless pressure sensor, based on an electromagnetic transduction approach, is reported. The sensing element is a flexible high resistivity silicon membrane located above a coplanar quarter-wavelength resonator. The comprehensive coverage of the physical bases is beyond the scope of this paper. For the remote extraction of the applied pressure value, the passive pressure sensor is connected to a broadband horn antenna via a coaxial delay line. When interrogated by a frequency modulated continuous wave radar, the level of the backscattered signal changes versus the pressure applied to the proof body. Through this interrogation principle, the sensor provides load impedance that is reflected back to the radar reader: the measured dynamic is about 0.8 dBm/bar. This completely passive and wireless pressure telemetry micro-sensor has been designed, fabricated and characterized, thereby eliminating the need for contact, signal processing circuits, and power supplies needed by conventional active sensors.

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References

Yacoub, M., Body Sensor Networks (Springer-Verlag, London, 2006)Google Scholar
Gaura, E., Newman, R., Smart MEMS and Sensor Systems (Imperial College Press, London, UK, 2006)CrossRefGoogle Scholar
Reindl, L., Scholl, G., Ostertag, T., Scherr, H., IEEE Trans. Ultrason. Ferroelec. Freq. Control 45, 1281 (1998)CrossRef
Pohl, A., IEEE Trans. Ultrason. Ferroelec. Freq. Control 47, 317 (2000)CrossRef
Schimetta, G., Dollinger, F., Weigel, R., IEEE Trans. Microwave Theory Tech. 48, 2730 (2000)CrossRef
Sternhagen, J.D., Wold, C.E., Kempf, W.A., Karlgaard, M., Mitzner, K.D., Mileham, R.D., Galipeau, D.W., IEEE Sensors J. 2, 301 (2002)CrossRef
Jatlaoui, M.M., Pons, P., Aubert, H., Radio Frequency Pressure Transducer, in 37th European Microwave Conference, Allemagne, Munich, Germany, 2007, pp. 736–739
Jatlaoui, M.M., Pons, P., Aubert, H., Pressure Micro-sensor based on Radio-Frequency Transducer, in IEEE International Microwave Symposium (IMS), Atlanta, Georgia, USA, 2008, pp. 1203–1206
Jatlaoui, M.M., Pons, P., Aubert, H., Radio-Frequency pressure transducer, in 39th European Microwave Conference, Rome, Italy, 2007 (2009), pp. 53–56Google Scholar
Matthei, G.L., Young, L., Jones, E.M.T., Microwave Filters, Impedance Matching Networks, and Coupling Structures (Artech House, Norwell, MA, 1980)Google Scholar
Wolff, I., Coplanar Microwave Integrated Circuits (Wiley, Hoboken, New Jersy, 2006)CrossRefGoogle Scholar
Aubert, H., Souny, B., Baudrand, H., IEEE Trans. Microwave Theory Tech. MTT-41, 450 (1993)CrossRef
Bouzidi, F., Aubert, H., Bajon, D., Baudrand, H., IEEE Trans. Microwave Theory Tech. MTT-45, 869 (1997)CrossRef
Aubert, H., Baudrand, H., Electromagnetism by Equivalent Circuits (Cépaduès-Editions, Collection Polytech, France, 2003) [in French]Google Scholar
Blasquez, G., Douziech, C., Pons, P., Sens. Actuators A Phys. 93, 44 (2001)CrossRef
Jatlaoui, M.M., Chebila, F., Gmati, I., Pons, P., Aubert, H., New Electromagnetic Transduction Micro-Sensor Concept for Passive Wireless Pressure Monitoring Application, in 15th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2009), Denver, Colorado, USA, 2009, pp. 1742–1745