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From photon emission microscopy to Raman spectroscopy: Failure analysis in microelectronics

Published online by Cambridge University Press:  15 July 2004

I. De Wolf  and
M. Rasras
I. De Wolf*
Affiliation:
IMEC, Kapeldreef 75, B-3001, Leuven, Belgium
M. Rasras
Affiliation:
Now at Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
*
dewolfi@imec.be
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Abstract

This paper discusses two techniques that have, at first sight, completely different applications: photon emission microscopy (PEM) and micro-Raman spectroscopy (μRS). We explain the principles of these techniques, their application domain, and we will show that they can in some cases offer complementary information, and be applied to common or similar problems.

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