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XPS Study of Polyimide H-Film After Heat Treatment and Laser Processing

Published online by Cambridge University Press:  21 February 2011

P.V. Nagarkar ,
E.K. Sichela  and
G.L. Doll
P.V. Nagarkar
Affiliation:
Dept. of Materials Science and Engineering, M.I.T., Cambridge, MA 02139
E.K. Sichela
Affiliation:
Dept. of Electrical Engineering and Computer Science, M.I.T., Cambridge, MA 02139
G.L. Doll
Affiliation:
Dept. of Physics, M.I.T., Cambridge, MA 02139
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Abstract

An x-ray photoelectron spectroscopy (XPS) study of laser treated and heat treated Kapton®indicates that both the treatments result in depleting the carbonyl groups from the sample and leave behind a conducting residue that still contains significant amounts of oxygen and nitrogen. The rapid changes in surface composition coincide with a substantial decrease in the electrical resistivity of the polyimide samples.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 154: Symposium K – Electronic Packaging Materials Science IV , 1989 , 363
Copyright
Copyright © Materials Research Society 1989

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