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UV Photoannealing and RTP of Thin Sol-Gel Films

Published online by Cambridge University Press:  10 February 2011

R. E.Van de Leest  and
F. Roozeboom
R. E.Van de Leest
Affiliation:
Philips Research Labs, Prof.Holstlaan 4, 5656 AA Eindhoven, The Netherlands
F. Roozeboom
Affiliation:
Philips Research Labs, Prof.Holstlaan 4, 5656 AA Eindhoven, The Netherlands
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Abstract

Various annealing methods for sol-gel films have been investigated. Thermal, photothermal, RTP and excimer laser annealing have been used to convert sol-gel precursor films into oxidic films. RTP annealing of sol-gel films yields better results than classical thermal annealing or excimer laser irradiation. Photochemical effects during RTP annealing contribute to obtain high-quality oxide films. The various annealing methods are illustrated by the annealing of alkoxide precursor films of tantalum, iron, nickel and yttrium.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 429: Symposium N – Rapid Thermal and Integrated Processing V , 1996 , 193
Copyright
Copyright © Materials Research Society 1996

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