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Transient Processes at the SI-Water Interface During Pulsed Laser Irradiation

Published online by Cambridge University Press:  26 February 2011

A. Polman ,
W. Sinke ,
M. J. Utitormark  and
Michael O. Thompson
A. Polman
Affiliation:
FOM-Institute for Atomic and Molecular Physics Kruislaan 407, 1098 SJ Amsterdam, The Netherlands
W. Sinke
Affiliation:
FOM-Institute for Atomic and Molecular Physics Kruislaan 407, 1098 SJ Amsterdam, The Netherlands
M. J. Utitormark
Affiliation:
Department of Materials Science Cornell University, Ithaca, NY 14853, USA
Michael O. Thompson
Affiliation:
Department of Materials Science Cornell University, Ithaca, NY 14853, USA
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Abstract

Heat transfer processes and phase transitions at the Si-water interface during nanosecond pulsed laser irradiation were studied in real time using transient optical reflectance measurements. Measurements at two probe laser polarizations suggest that during irradiation a steam phase is formed near the Si surface. Relaxation of this phase occurs several hundred nanoseconds after solidification of the Si is completed. Acousto-optical measurements indicate that a shock wave, propagating with the sound velocity in water, is initiated near the Si-water interface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 100: Symposium – A Fundamentals of Beam-Solid Interactions and Transient Thermal Processing , 1988 , 555
Copyright
Copyright © Materials Research Society 1988

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References

REFERENCES

1 Ogale, S.B., Polman, A., Quentin, F.O.P., Roorda, S. and Saris, F.W., Appl. Phys. Lett. 50, 138 (1987)CrossRefGoogle Scholar
2 Patil, P.P., Phase, D.M., Kulkarni, S.A., Ghaisas, S.V., Kulkarni, S.K., Kanetkar, S.M., Ogale, S.B. and Bhide, V.G., Phys. Rev. Lett. 58, 238 (1987)CrossRefGoogle Scholar
3 Nakamura, K., Hikita, M., Asano, H. and Terada, A., Appl. Phys. Lett. 21, 672 (1982)Google Scholar
4 Chan, S.-W., Dijkkamp, D., Wu, X.D., Venkatesan, T. and Chang, C.C. in Beam-Solid Interactions and Transient Processes, edited by Thompson, M.O., Picraux, S.T. and Williams, J.S. (Mater. Res. Soc. Proc. 74, Pittsburgh, PA 1987) p. 287 Google Scholar
5 Dijkkamp, D., Wu, X.D., Chan, S.-W. and Venkatesan, T. in Photon. Beam. and Plasma Stimulated Chemical Processes at Surfaces, edited by Donnely, V.M., Herman, I.P. and Hirose, M. (Mater. Res. Soc. Proc. 75, Pittsburgh, PA 1987) p. 303 Google Scholar
6 Partridge, J. P., Pellegrino, J., Murphy, C. and Strutt, P.R., in Photon. Beam. and Plasma Stimulated Chemical Processes at Surfaces, edited by Donnely, V.M., Herman, I.P. and Hirose, M. (Mater. Res. Soc. Proc. 75, Pittsburgh, PA 1987) ref. 4, p. 173 Google Scholar
7 Polman, A., Sinke, W. and Saris, F.W., Uttormark, M.J. and Thompson, M.O., unpublishedGoogle Scholar
8 Polman, A., Roorda, S., Ogale, S.B. and Saris, F.W., unpublished ref. 4, p. 129 Google Scholar
9 Polman, A. and Sinke, W., Uttormark, M.J. and Thompson, M.O., unpublishedGoogle Scholar
10 Cullis, A.G.. Webber, H.C. and Bailey, P., J.Phys.E: Sci. Instrum. 12 (1979) 688 Google Scholar
11 Auston, D.H., Surko, C.M., Vankatesan, T.N.C., Slusher, R.E. and Golovochenko, J.A., Appl. Phys. Lett. 3, 437 (1978)Google Scholar
12 Galvin, G.J., Thompson, M.O., Mayer, J.W., Hammond, R.B., Paulter, N. and Peercy, P.S., Phys. Rev. Lett. 48, 33 (1982)Google Scholar
13 Azzam, R.M.A. and Bashara, N.M., Ellipsometry and Polarized Light, (North-Holland, Amsterdam, 1987)CrossRefGoogle Scholar
14 Landolt-Börnstein, , Eigenschaften der Materie in ihren Aggregatzuständen. 8. Teil, (Springer, Berlin, 1962)Google Scholar
15 Walsh, J.M. and Rice, M. H., Journ. Chem. Phys. 26, 815 (1957)Google Scholar
16 CRC Handbook of Chemistry and Physics (Chemical Rubber Company, Boca Raton, 1981)Google Scholar