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Published online by Cambridge University Press: 21 February 2011
Trace analysis of nanometer-scale objects can be performed with parallel-detection electron energy loss spectrometry in the analytical electron microscope. Spectra are collected in the second difference mode with the beam current chosen to maximize the spectral count rate. Numerous elements can be detected at trace levels below 100 parts per million atomic, including transition metal, alkali metal, alkaline earth, and rare earth elements, provided they have a “white line” resonance structure at the ionization edge. Trace nanoanalysis by AEM/PEELS permits direct examination of the microscopic distribution of trace constituents.