Hostname: page-component-745bb68f8f-cphqk Total loading time: 0 Render date: 2025-01-29T00:00:58.519Z Has data issue: false hasContentIssue false
  • English
  • Français

Thermal and Mechanical Properties of Diamond-Like a-C:H Films

Published online by Cambridge University Press:  25 February 2011

G. Amato ,
G. Benedetto ,
L. Boarino ,
F. Demichelis ,
C. F. Pirri ,
R. Spagnolo  and
A. Tagliaferro
G. Amato
Affiliation:
Istituto Elettrotecnico Nazionale Galileo Ferraris Strada delle Cacce 91, 10135, Torino -, Italy
G. Benedetto
Affiliation:
Istituto Elettrotecnico Nazionale Galileo Ferraris Strada delle Cacce 91, 10135, Torino -, Italy
L. Boarino
Affiliation:
Istituto Elettrotecnico Nazionale Galileo Ferraris Strada delle Cacce 91, 10135, Torino -, Italy
F. Demichelis
Affiliation:
Politecnico di Torino, Dipartimento di Fisica Corso Duca degli Abruzzi 24, 10129, Torino -, Italy
C. F. Pirri
Affiliation:
Politecnico di Torino, Dipartimento di Fisica Corso Duca degli Abruzzi 24, 10129, Torino -, Italy
R. Spagnolo
Affiliation:
Istituto Elettrotecnico Nazionale Galileo Ferraris Strada delle Cacce 91, 10135, Torino -, Italy
A. Tagliaferro
Affiliation:
Politecnico di Torino, Dipartimento di Fisica Corso Duca degli Abruzzi 24, 10129, Torino -, Italy
Get access

Abstract

Diamond-like amorphous carbon and hydrogenated amorphous carbon films (DLC) prepared by rf sputtering have been characterized by means of measurements of optical gap, hardness and Young's modulus. Preliminary results of the application of the photothermal displacement technique (PTD) are also reported, confirming that this method can in principle be applied for a more complete characterization of DLC films at room temperature and low temperatures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 270: Symposium M – Novel Forms of Carbon , 1992 , 475
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Olmstead, A., Amer, N. M., Kohn, S., Fournier, D. and Boccara, A. C., Appl. Phys. A 32, 141 (1983).CrossRefGoogle Scholar
[2] Welsch, E., J. Mod. Optics 1, 2159 (1991).CrossRefGoogle Scholar
[3] Demichelis, F., Giacchello, G., Pirri, C. F. and Tagliaferro, A., Proc. of the SPIE Int. Soc. for Opt. Ing., vol. 1534 (Diamond Optics), 140 (1991).CrossRefGoogle Scholar
[4] Amato, G., Benedetto, G., Boarino, L. and Spagnolo, R., to appear in J. Mod. Optics.Google Scholar
[5] Gupta, D. Das, Demichelis, F., Pirri, C. F. and Tagliaferro, A., Phys.Rev. B, 43, 2131 (1991).Google Scholar
[6] Demichelis, F., Pirri, C. F. and Tagliaferro, A., Phys. Rev. B 45 (1991) (in press).Google Scholar
[7] Touloukian, Y. S., Powell, R. W., Ho, C. Y. and Klemens, P. G., Thermophysical Properties of Matter, vol.2, IFI/Plenum Press, New York 1970.Google Scholar