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Testing of porous silicon membranes as a novel humidity sensor

Published online by Cambridge University Press:  17 March 2011

L. Quercia ,
M. Della Noce ,
V. La Ferrara  and
G. Di Francia
L. Quercia
Affiliation:
ENEA Centro Ricerche Portici, I-80055 Portici, (Italy) e-mail: quercia@portici.enea.it
M. Della Noce
Affiliation:
ENEA Centro Ricerche Portici, I-80055 Portici, (Italy
V. La Ferrara
Affiliation:
ENEA Centro Ricerche Portici, I-80055 Portici, (Italy
G. Di Francia
Affiliation:
ENEA Centro Ricerche Portici, I-80055 Portici, (Italy
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Abstract

A new gas sensor device based on a porous silicon membrane has been fabricated. The sensible membrane has been bonded to a 1 cm2 Al2O3 substrate [1], where electrical contacts have been previously deposited by vacuum evaporation. In this work we present the results of DC measurements showing a good response of this device to humidity gradients. In this frame, the most striking properties of our device are its selectivity and a fast and full recovery after exposure to humidity levels up to 90%. Moreover, the new fabrication process used to realize the sensor merges the advantages typical of porous silicon with thin film ones, by means of a simple process.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 638: Symposium F – Microcrystaline & Nanocrystalline Semiconductors-2000 , 2000 , F5.32.1
Copyright
Copyright © Materials Research Society 2001

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References

1. Francia, G. Di, Quercia, L., Vitiello, R., Roca, F., Ninno, D., Ferrara, V. La, Iadonisi, G., Lancellotti, L., Sberveglieri, G., Maddalena, P.: “Metodo per la fabbricazione di dispositivi a stato solido”patent No Ge99A000146 deposited at Italian Patent Office on December 29th 1999.Google Scholar
2. Traversa, E., Ceramic sensors for humidity detection: the state of the art and future development, Sensor and Actuators B23, 135–156,(1995).Google Scholar
3. Rittersma, Z.M. PhD. Thesis: “Microsensors application of porous silicon”, Shaker Publishing B.V., Maastricht (1999).Google Scholar
4. Iadonisi, G., Ninno, D., Francia, G. Di, Quercia, L., Ferrara, V. La et al. : “Testing of porous silicon as H2O vapour sensor” Proc. Nat. Meet. on Sensors for Advaced Applications, Brescia, Italy, May 16-17, 1996, Conf.Proc. Vol. 54 “SAA96”, G. Sberveglieri and E. Tondello eds., SIF, Bologna, 1997Google Scholar
5. Baratto, C., Faglia, G., Comini, E., Sberveglieri, G., Quercia, L., Francia, G. Di et al. , “Detection of low concentrations of NO2 by a porous silicon sensor”, in Proc. of the International Meeting on Chemical Sensors (IMCS2000), Basel, Switzerland, July 2-5, 2000.Google Scholar
6. “Properties of Porous Silicon”, Canham, L. Editor, INSPEC, London (1997).Google Scholar
7. Francia, G. Di, Ferrara, V. La, Lancellotti, L. and Quercia, L. “Porous Silicon Based Gas Sensor” in “Recent Research Development in Electrochemistry”, editor Pandarai, S.G., publisher Transworld Research Network (Trivandrum, India) (2000), pag93–106.Google Scholar
8. Quercia, L., Cerullo, F., Ferrara, V. La, Francia, G. Di, Baratto, C., Faglia, G.: “Fabrication and Characterization of a Sensing Device based on Porous Silicon”, Physica Status Solidi (a), Vol. 182, No 1, (2000), pag. 473–477.Google Scholar