Hostname: page-component-745bb68f8f-5r2nc Total loading time: 0 Render date: 2025-02-09T21:48:01.081Z Has data issue: false hasContentIssue false
  • English
  • Français

Techniques and Applications for Non-Planar Lithography

Published online by Cambridge University Press:  11 February 2011

John A. Rogers
John A. Rogers*
Affiliation:
Bell Laboratories, Lucent Technologies, Murray Hill, NJ 07974, U.S.A.
Get access

Abstract

Certain classes of three dimensional nanostructures can be fabricated by contact printing patterns onto curved or non-flat surfaces. This paper reviews some of our work that demonstrates this approach by using microcontact printing to form a range of three dimensional structures with feature sizes as small as 1–2 microns and it demonstrates their use in a variety of functional devices. We also describe a nanotransfer printing technique with operational characteristics that are similar to those of microcontact printing but which enables nanometer resolution. High resolution replica molding techniques provide a method for producing copies of some of these printed structures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 739: Symposium H – Three-Dimensional Nanoengineered Assemblies , 2002 , H1.2
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Mirkin, C.A. and Rogers, J.A., MRS Bull. 26, 506 (2001).Google Scholar
2. Kumar, A. and Whitesides, G.M., Appl. Phys. Lett. 63, 2002 (1993).Google Scholar
3. Jackman, R.J., Wilbur, J. and Whitesides, G.M., Science 269, 664 (1995).Google Scholar
4. Rogers, J.A., MRS Bull. 26, 530 (2001).Google Scholar
5. Jackman, R.J., Brittain, S.T., Adams, A., Prentiss, M.G. and Whitesides, G.M., Science 280, 2089 (1998).Google Scholar
6. Rogers, J.A., Jackman, R.J., Wagener, J.L., Vengsarkar, A.M. and Whitesides, G.M., Appl. Phys. Lett. 70, 7 (1997).Google Scholar
7. Loo, Y.-L., Willett, R.L., Baldwin, K. and Rogers, J.A., Appl. Phys. Lett. 81, 562 (2002).Google Scholar
8. Loo, Y.-L., Willett, R.L., Baldwin, K. and Rogers, J.A., J. Am. Chem. Soc. 124, 7654 (2002).Google Scholar
9. Loo, Y.-L., Hsu, J.W.P., Willett, R.L., Baldwin, K.W., West, K.W. and Rogers, J.A., J. Vac. Sci. Techn. B., in press.Google Scholar
10. Rogers, J.A., Jackman, R.J. and Whitesides, G.M., Adv. Mater. 9, 475 (1997).Google Scholar
11. Rogers, J.A., Jackman, R.J., Whitesides, G.M., Olson, D.L. and Sweedler, J.V., Appl. Phys. Lett. 70, 2464 (1997).Google Scholar
12. Rogers, J.A., Jackman, R.J. and Whitesides, G.M., J. Microelectromech. Syst. (JMEMS) 6, 184 (1997).Google Scholar
13. Jackman, R.J., Rogers, J.A. and Whitesides, G.M., IEEE Trans. Magn. 33, 2501 (1997).Google Scholar
14. Rogers, J.A., Meier, M. and Dodabalapur, A., Appl. Phys. Lett. 74, 3257 (1999).Google Scholar
15. Rogers, J.A., Bao, Z., Dodabalapur, A., Schueller, O.J.A. and Whitesides, G.M., Synth. Met., 115, 5 (2000).Google Scholar