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A Technique for Preparing “Two in One” Cross-Sectional TEM Specimens

Published online by Cambridge University Press:  16 February 2011

Guang-Hwa M. Ma  and
Sopa Chevacharoenkul
Guang-Hwa M. Ma
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695–7907
Sopa Chevacharoenkul
Affiliation:
Materials Research Group, Microelectronics Center of North Carolina, Research Triangle Park, NC 27709
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Abstract

A modified “two-in-one” cross-sectional TEM sample preparation technique is described. By coating a thin layer of “marker” to distinguish one sample from the other, two samples could be simultaneously prepared in one TEM cross-sectional specimen. Therefore, the specimen preparation time is reduced by nearly one half. The coating can be done in an existing ion-mill. Criteria for choosing a suitable marker as well as tips on getting good quality specimens are described. An example of applying this technique to a processing-microstructure study of an ultra-shallow junction formation in silicon is demonstrated.

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References

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