Hostname: page-component-cb9f654ff-9b74x Total loading time: 0 Render date: 2025-09-10T00:17:14.457Z Has data issue: false hasContentIssue false
  • English
  • Français

A Technique for Preparing “Two in One” Cross-Sectional TEM Specimens

Published online by Cambridge University Press:  16 February 2011

Guang-Hwa M. Ma  and
Sopa Chevacharoenkul
Guang-Hwa M. Ma
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695–7907
Sopa Chevacharoenkul
Affiliation:
Materials Research Group, Microelectronics Center of North Carolina, Research Triangle Park, NC 27709
Get access

Abstract

A modified “two-in-one” cross-sectional TEM sample preparation technique is described. By coating a thin layer of “marker” to distinguish one sample from the other, two samples could be simultaneously prepared in one TEM cross-sectional specimen. Therefore, the specimen preparation time is reduced by nearly one half. The coating can be done in an existing ion-mill. Criteria for choosing a suitable marker as well as tips on getting good quality specimens are described. An example of applying this technique to a processing-microstructure study of an ultra-shallow junction formation in silicon is demonstrated.

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

REFERENCES

1. Abrahams, M. S. and Buiocchi, C. J., J. Appl. Phys. 45, 3315 (1974).Google Scholar
2. Sheng, T. T. and Marcus, R. B., J. Electrochem. Soc. 127(3), 737 (1980).Google Scholar
3. Bravman, J. C. and Sinclair, R., J. Electron Microsc. Technique 1 53 (1984).Google Scholar
4. Rivaud, Lydia, J. Electron Microsc. Technique 2, 577 (1985).Google Scholar