Hostname: page-component-54dcc4c588-9xpg2 Total loading time: 0 Render date: 2025-09-12T19:42:55.344Z Has data issue: false hasContentIssue false
  • English
  • Français

Synthesis and Dispersion of Ultra-Small Binary and Ternary Metal Oxide Nanoparticles for Dielectric Thin Films

Published online by Cambridge University Press:  03 March 2011

Tarik A. Cheema ,
Dan Taroata ,
Guenter Schmid  and
Georg Garnweitner
Tarik A. Cheema
Affiliation:
Technische Universität Braunschweig, Institute of Particle Technology Volkmaroder Str. 5, 38104 Braunschweig, Germany
Dan Taroata
Affiliation:
Siemens AG, Corporate Technology - Global Technology Field Organic Electronics Guenter-Scharowsky-Str. 1, 91054 Erlangen, Germany Technische Universität Dresden, Institute for Semiconductor and Microsystems Technology 01062 Dresden, Germany
Guenter Schmid
Affiliation:
Siemens AG, Corporate Technology - Global Technology Field Organic Electronics Guenter-Scharowsky-Str. 1, 91054 Erlangen, Germany
Georg Garnweitner
Affiliation:
Technische Universität Braunschweig, Institute of Particle Technology Volkmaroder Str. 5, 38104 Braunschweig, Germany
Get access

Abstract

Fabrication of dielectric thin films using dispersions of ultra-small ZrO2 and BaTiO3 nanoparticles with a low-temperature processing is reported. Highly crystalline and monodisperse cubic-ZrO2 and tetragonal-BaTiO3 nanoparticles were synthesized using non-aqueous approach. Post synthesis, nanoparticle dispersions were realized through chemical modification of their surface. The obtained dispersions were then employed for the fabrication of homogeneous and densely-packed dielectric thin films, verified through scanning electron microscopy.

Keywords

dielectricnanostructurethin film

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1303: Symposium Y – Nanomaterials Integration for Electronics, Energy and Sensing , 2011 , mrsf10-1303-y14-05
Copyright
Copyright © Materials Research Society 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

REFERENCES

[1] Sigman, J., Brennecka, G.L., Clem, P.G., and Tuttle, B.A., “Fabrication of Perovskite-Based High-Value Intergrated Capacitors by Chemical Solution Deposition,” J. Am. Ceram. Soc, vol. 91, no. 6, pp. 1851–1857, 2008.Google Scholar
[2] Raj, P.M., Balaraman, D., Abothu, I.R., Yoon, C., Kang, N.K., and Tummala, R.R., “Integrating High-k Ceramic Thin Film Capacitors into Organic Substrates Via Low-Cost Solution Processing,” IEEE Trans. Compon. Packag. Technol, vol. 30, no. 4, pp. 585–594, 2007.Google Scholar
[3] Vehkamäki, M., Hatanpää, T., Ritala, M., Leskelä, M., Väyrynen, S., and Rauhala, E., “Atomic Layer Deposition of BaTiO3 Thin Films - Effect of Barium Hydroxide Formation,” Chem. Vap. Deposition, vol. 13, pp. 239–246, 2007.Google Scholar
[4] Nagata, H., Ko, S.W., Hong, E., Randall, C.A., Trolier-McKinstry, S., Pinceloup, P., Skamser, D., Randall, M., and Tajuddin, A., “Microcontact Printed BaTiO3 and LaNiO3 Thin Films for Capacitors,” J. Am. Ceram. Soc, vol. 89, no. 9, pp. 2816–2821, 2006.Google Scholar
[5] Kim, P., Jones, S.C., Hotchkiss, P.J., Haddock, J.N., Kippelen, B., Marder, S.R., and Perry, J.W., “Phosphonic Acid-Modified Barium Titanate Polymer Nanocomposites with High Permittivity and Dielectric Strength,” Adv. Mater, vol. 19, pp. 1001–1005, 2007.Google Scholar
[6] Garnweitner, G., Goldenberg, L.M., Sakhno, O.V., Antonietti, M., Niederberger, M., and Stumpe, J., “Large-scale synthesis of organophilic zirconia nanoparticles and their application in organic-inorganic nanocomposites for efficient volume holography,” Small, vol. 3, no. 9, pp. 1626–1632, 2007.Google Scholar
[7] Tsedev, N. and Garnweitner, G., “Surface Modification of ZrO2 Nanoparticles as Functional Component in Optical Nanocomposite Devices,” Mater. Res. Soc. Symp. Proc, pp. 1076-K05-03, 2008.Google Scholar
[8] Niederberger, M., Garnweitner, G., Pinna, N., and Antonietti, M., “Nonaqueous and Halide-Free Route to Crystalline BaTiO3, SrTiO3 and (Ba, Sr)TiO3 Nanoparticles via a Formation Mechanism Involving a C-C Bond Formation,” J. Am. Chem. Soc, vol. 126, no. 29, pp. 9120–9126, 2004.Google Scholar
[9] Petkov, V., Gateshki, M., Niederberger, M., and Ren, Y., “Atomic-Scale Structure of Nanocrystalline BaxSr1-xTiO3 (x = 1, 0.5, 0) by X-ray Diffraction and the Atomic Pair Distribution Function Technique,” Chem. Mater, vol. 18, no. 3, pp. 814–821, 2006.Google Scholar