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Published online by Cambridge University Press: 10 February 2011
A new methodology was developed to stabilized zirconia films at room temperature. The zirconium oxide films were prepared electrochemically by anodic oxidation of metallic zirconium at constant curcent density. X-ray diffraction (XRD) revealed the partial stabilization of the cubic phase in the ZrO2 films obtained in the presence of calcium. On the other hand, the films obtained in H3PO4 presented monoclinic phase. Scanning electron microscopy (SEM) showed that the oxide films obtained in calcium medium were porous, while the films obtained in H3PO4 were compact. X-ray photoelectron spectroscopy (XPS) identified ZrO2 and the intercalation of Na, N, P and CaO, as well as adventitious carbon. Using depth profiling, we observed that the concentrations of ZrO2, P and CaO increased with sputtering time.