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Surface and bulk properties of boride/nitride nanoscale films

Published online by Cambridge University Press:  10 February 2011

R. A. Adrievski
R. A. Adrievski*
Affiliation:
Institute for New Chemical Problems, Russian Academy of Sciences, Chemogolovka, Moscow Region, 142432, Russia
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Abstract

Nanoscale TiB2/TiN films have been prepared by d.c. and r.f. magnetron non-reactive sputtering and examined by TEM, SAED, SEM, AES, XPS, XRD, AFM as well as nanoindentation. Attention has been focused on both bulk and surface physical-mechanical properties. The effect of the latter on the nanoindentaion test results seems to be very important. Two types of film fracture under a Vickers indentor connected with homogeneous and inhomogeneous deformation have been described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 501: Symposium FF – Surface Controlled Nanoscale Materials for High-Added… , 1997 , 149
Copyright
Copyright © Materials Research Society 1998

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References

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