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The Structure of the Boron-Hydrogen Complex in Silicon

Published online by Cambridge University Press:  26 February 2011

A. D. Marwick ,
G. S. Oehrlein ,
J. H. Barrett  and
N. M Johnson
A. D. Marwick
Affiliation:
IBM T.J. Watson Research Center, Yorktown Heights, NY 10598
G. S. Oehrlein
Affiliation:
IBM T.J. Watson Research Center, Yorktown Heights, NY 10598
J. H. Barrett
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, TN 37831
N. M Johnson
Affiliation:
Xerox Palo Alto Research Center, Palo Alto, CA 94304
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Abstract

Channeling and lattice location has been used to investigate the structure of the boron-hydrogen complex in crystalline silicon. The positions of both the boron and hydrogen atoms have been determined. The results are compared with Monte-Carlo simulations. The boron atom in the B-H pair is found to be displaced from a substitutional site by 0.28±0.03Å, while the hydrogen atom is predominantly at a bond-center site, with a small proportion in a back-bonded position.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 104 , 1987 , 259
Copyright
Copyright © Materials Research Society 1988

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References

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