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Structural Inhomogeneity of SrBi2Ta2O9Thin Films Prepared by Layer-by-Layer Technique

Published online by Cambridge University Press:  17 March 2011

J. B. Xu ,
G. D. Hu  and
S. P. Wong
J. B. Xu
Affiliation:
Department of Electronic Engineering and Material Science and Technology Research Center, The Chinese University of Hong Kong, Hong Kong SAR, China
G. D. Hu
Affiliation:
Department of Electronic Engineering and Material Science and Technology Research Center, The Chinese University of Hong Kong, Hong Kong SAR, China
S. P. Wong
Affiliation:
Department of Electronic Engineering and Material Science and Technology Research Center, The Chinese University of Hong Kong, Hong Kong SAR, China
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Abstract

Grazing incidence x-ray diffraction has been employed to perform the depth-profile analysis on SrBi2Ta2O9 (SBT) thin films with different preferential orientations. For the polycrystalline SBT thin film, the change in structural orientation occurs only within the 15-nm-thick top layer, which is associated with the formation of the (200)-predominant SBT thin film prepared by the layer-by-layer annealing process. The inhomogeneity of structural orientation is more significant in the full film thickness for the (200)- predominant SBT thin film. (0010) peak can only be observed for the grazing angle larger than 0.6°. A layer with the highest ratio of I(200)/I(115) is found in the top surface layer (i.e., the latest layer during deposition) of the (200)-predominant SBT thin film.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 688: Symposium C – Ferroelectric Thin Films X , 2001 , C4.7.1
Copyright
Copyright © Materials Research Society 2002

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