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Stable Solar Cells Prepared from Dichlorosilane

Published online by Cambridge University Press:  10 February 2011

Y. Yamamoto ,
W. Futako ,
K. Fukutani ,
M. Hagino ,
T. Sugawara ,
T. Kamiya ,
C.M. Fortmann  and
I. Shimizu
Y. Yamamoto
Affiliation:
Dept. of Innovative and Engineering Materials, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, Japan, 226-8502
W. Futako
Affiliation:
Dept. of Innovative and Engineering Materials, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, Japan, 226-8502
K. Fukutani
Affiliation:
Dept. of Innovative and Engineering Materials, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, Japan, 226-8502
M. Hagino
Affiliation:
Dept. of Innovative and Engineering Materials, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, Japan, 226-8502
T. Sugawara
Affiliation:
Dept. of Innovative and Engineering Materials, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, Japan, 226-8502
T. Kamiya
Affiliation:
Dept. of Innovative and Engineering Materials, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, Japan, 226-8502
C.M. Fortmann
Affiliation:
Dept. of Innovative and Engineering Materials, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, Japan, 226-8502
I. Shimizu
Affiliation:
Dept. of Innovative and Engineering Materials, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, Japan, 226-8502
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Abstract

Amorphous silicon films and solar cell i-layers were prepared from dichlorosilane(DCS) by ECR- and VHF-CVD. The hydrogen content, the chlorine content and the band gap could be controlled by varying argon and hydrogen dilution. The interaction of energetic and reactive plasma species with substrates and other previously deposited layers was studied. DCS, ECR-CVD causes darkening of TCO substrates even when buffer layers and/or doped layers were previously deposited by RF-CVD. Therefore n-i-p solar cell structures were prepared on NiCr and subsequent p-i-n solar cells were prepared with VHF-CVD which did not causeTCO reduction or other reactions in previously deposited amorphous layers. Preliminary results indicate that the VHF-CVD solar cells are at least as stable as standard amorphous silicon solar cells.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 507: Symposium A – Amorphous & Microcrystalline Silicon Technology 1998 , 1998 , 199
Copyright
Copyright © Materials Research Society 1998

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References

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