Published online by Cambridge University Press: 15 February 2011
Gated photon counting spectroscopy and species-resolved ICCD photography have been applied to study the weak plasma luminescence which occurs following the propagation of the initial ablation plume in vacuum and during the ‘rebound’ of the plume with a substrate during pulsed laser deposition of amorphous diamond. These time- and spatially-resolved spectroscopic techniques were required in order to investigate notable differences between amorphous diamond-like carbon films formed by pulsed laser deposition from ArF (193 nm) and KrF (248 nm) irradiation of pyrolytic graphite in vacuum. Three principal regions of plume emission have been characterized: (1) a bright luminescent ball (v ∼3-5 cm/(μ.s) displaying nearly entirely C+ emission which appears to result from laser interaction with the initial ejecta, (2) a spherical ball of emission (v ∼1 cm/μs) displaying neutral carbon atomic emission lines and, at early times, jets of excited C2, and (3) a well-defined region of broadband emission (v ∼ 0.3 cm/μs) near the target surface first containing emission bands from C2, then weak, continuum emission thought to result from C3 and higher clusters and/or blackbody emission from hot clusters or nanoparticles. For both lasers, the measurements reveal an explosive interaction within the plume which results in a variety of new gas dynamic observations in vacuum:. These include (a) generation of instabilities or jets, (b) confinement of a residual part of the plume near the pellet surface, (c) cluster formation in the collisional, confined regions of the plume, and (d) reflection of the confined region backward to splash and redeposit on the pellet surface. Evidence for gas-phase formation of these clusters in vacuum is indicated from the dynamic evolution of the same cluster bands observed during the collision of the plume with the substrate surface during film growth. Addition of background gases strongly enhances the third (cluster) component, in accordance with plume-splitting phenomena. The combination of sensitive imaging and photon-counting diagnostic techniques permit an understanding of the importance of gas dynamic effects, such as clustering, on the time-of-flight distributions of species arriving during the deposition of thin films in both vacuum and background gases.
To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about saving to your Kindle.
Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.
Find out more about the Kindle Personal Document Service.
To save this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Dropbox account. Find out more about saving content to Dropbox.
To save this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Google Drive account. Find out more about saving content to Google Drive.