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Single-Crystal Fine-Positioning Devices for Scanned-Probe Microscopies

Published online by Cambridge University Press:  15 February 2011

R. N. Kleiman
R. N. Kleiman*
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974, rnk@physics.att.com
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Abstract

We have developed a novel fine-positioning device for scanned-probe microscopies. Instead of the conventional scanner tube made of ceramic PZT material, we have constructed analogous structures from single-crystal piezoelectric wafers. Single-crystal materials, in particular Lithium Niobate, are available which solve many of the problems inherent with PZT. In addition, their superior thermal and mechanical properties lead to improved performance in a number of significant ways. We discuss the actual implementation of this idea in the construction of a scanner, possible applications for this design, and briefly discuss results obtained.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 406: Symposium L – Diagnostic Techniques for Semiconductor Materials Processing , 1995 , 221
Copyright
Copyright © Materials Research Society 1996

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References

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