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Simulation of Mechanical Deformation and Tribology of Nano-Thin Amorphous Hydrogenated Carbon (a:Ch) Films Using Molecular Dynamics

Published online by Cambridge University Press:  15 February 2011

J. N. Glosli ,
M. R. Philpott  and
J. Belak
J. N. Glosli
Affiliation:
University of California, Lawrence Livermore National Laboratory, Livermore CA 94550
M. R. Philpott
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120–6099
J. Belak
Affiliation:
University of California, Lawrence Livermore National Laboratory, Livermore CA 94550
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Abstract

Molecular dynamics computer simulations are used to study the effect of substrate temperature on the microstructure of deposited amorphous hydrogenated carbon (a:CH) films. A transition from dense diamond-like films to porous graphite-like films is observed between substrate temperatures of 400K and 600K for a deposition energy of 20 eV. The dense a:CH film grown at 300K and 20 eV has a hardness (˜50 GPa) about half that of a pure carbon (a:C) film grown under the same conditions.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 436: Symposium CC – Thin Films Stresses and Mechanical Properties VI , 1996 , 265
Copyright
Copyright © Materials Research Society 1997

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