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Selective laser melting of high aspect ratio 3D nickel – titanium structures for MEMS applications

Published online by Cambridge University Press:  01 February 2011

Paul Chalker ,
Adam Clare ,
Sean Davies ,
Christopher J. Sutcliffe  and
Sozon Tsopanos
Paul Chalker
Affiliation:
pchalker@liv.ac.uk, University of Liverpool, Engineering, Brownlow Hill, Liverpool, Merseyside, L69 3GH, United Kingdom, 0151 794 4313, 0151 794 4675
Adam Clare
Affiliation:
A.T.Clare@liv.ac.uk
Sean Davies
Affiliation:
S.Davies01@liverpool.ac.uk
Christopher J. Sutcliffe
Affiliation:
C.Sutcliffe@liverpool.ac.uk
Sozon Tsopanos
Affiliation:
sozos@liverpool.ac.uk
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Abstract

Selective laser melting has been used to build high aspect ratio, three-dimensional NiTi components for the first time. The influence of laser dwell time and raster pitch on the density of NiTi shape memory alloy parts and their resolvable feature sizes are reported. The properties of shape memory springs produced by this method are reported and the application of selective laser melted NiTi components in microelectromechanical devices is discussed.

Keywords

laser annealingmicroelectro-mechanical (MEMS)scanning electron microscopy (SEM)

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 890: Symposium Y – Surface Engineering for Manufacturing Applications , 2005 , 0890-Y03-02
Copyright
Copyright © Materials Research Society 2006

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References

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