No CrossRef data available.
Published online by Cambridge University Press: 03 September 2012
We propose and demonstrate a new mask material of AlGaAs native oxide for selective area metalorganic vapor phase epitaxy (MOVPE) which has several advantages over conventional SiNx or SiO2 masks. GaAs selective area growth occurs on masked substrate of AlGaAs native oxide whose Al composition is 0.4, and the wire structures with trapezoidal cross section are formed along ]100] direction on (001) GaAs substrates with line & space mask pattern. Furthermore, after annealing the selectively grown GaAs wire samples, GaAs layers can be regrown with atomically smooth surface, in which GaAs wires are perfectly buried. The results show that this novel selective area MOVPE technique using AlGaAs native oxide masks are promising for quantum nano-structure device fabrication.
To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about saving to your Kindle.
Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.
Find out more about the Kindle Personal Document Service.
To save this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Dropbox account. Find out more about saving content to Dropbox.
To save this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Google Drive account. Find out more about saving content to Google Drive.