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Resonance Method: An Attractive Way to Evaluate Mechanical Properties of Thin Gold Films

Published online by Cambridge University Press:  10 February 2011

P. Attia  and
P. Hesto
P. Attia
Affiliation:
Institut d'Electronique Fondamentale, URA 022, Université Paris XI, 91405 Orsay Cedex, France. Patrick.attia@ief.u-psud.fr
P. Hesto
Affiliation:
Institut d'Electronique Fondamentale, URA 022, Université Paris XI, 91405 Orsay Cedex, France. Patrick.attia@ief.u-psud.fr
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Abstract

Micromechanical test structures have been developed for evaluating mechanical properties of thin gold films. Using micromachining techniques, gold cantilever beams of different geometry (typically 40 to 100-µm-long, 2-µm-thick and around 1-µm-wide), were fabricated. These cantilevers were resonated by electrical excitation in a scanning electron microscope (SEM) and Young's modulus, Q-factor and fatigue properties were deduced from these experiments. The longest cantilevers showed a slight upward curvature which allowed the internal stress gradient to be evaluating.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 518: Symposium N – Microelectromechanical Structures for Materials Research , 1998 , 3
Copyright
Copyright © Materials Research Society 1998

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