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Pulsed Laser Deposition of ZnO: Energetic Rydberg State Atoms and Their Impact on Film Growth

Published online by Cambridge University Press:  15 February 2011

Robert E. Leuchtner
Robert E. Leuchtner*
Affiliation:
Physics Department, University of New Hampshire, Durham, NH
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Abstract

A detailed comparison of the ZnO film microstructure prepared with both targets at two deposition pressures (0.01 and 0.1 torr) and a variety of substrate temperatures from 50-500°C was performed. The crystallographic and morphological results suggest that the condensation of highly electronically excited state particles, both ions and long-lived excited state neutrals likely affects film growth, and can enhance desirable surface processes, such as athermal recrystallizalion and surface mobility, that favor oriented crystal growth at lower substrate temperatures.

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