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Pulsed Laser Deposition of ZnO: Energetic Rydberg State Atoms and Their Impact on Film Growth

Published online by Cambridge University Press:  15 February 2011

Robert E. Leuchtner
Robert E. Leuchtner*
Affiliation:
Physics Department, University of New Hampshire, Durham, NH
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Abstract

A detailed comparison of the ZnO film microstructure prepared with both targets at two deposition pressures (0.01 and 0.1 torr) and a variety of substrate temperatures from 50-500°C was performed. The crystallographic and morphological results suggest that the condensation of highly electronically excited state particles, both ions and long-lived excited state neutrals likely affects film growth, and can enhance desirable surface processes, such as athermal recrystallizalion and surface mobility, that favor oriented crystal growth at lower substrate temperatures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 397: Symposium B – Advanced laser Processing of Materials-Fundamentals and Applications , 1995 , 157
Copyright
Copyright © Materials Research Society 1996

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References

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