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Pulsed Laser Ablation of Boron Nitride

Published online by Cambridge University Press:  15 February 2011

Keon Bae Shin ,
Seung Min Park  and
Young Man Kim
Keon Bae Shin
Affiliation:
Department of Chemistry, Kyung Hee University, Seoul 130-701, Korea
Seung Min Park
Affiliation:
Department of Chemistry, Kyung Hee University, Seoul 130-701, Korea
Young Man Kim
Affiliation:
Advanced Analysis Center, Korea Institute of Science and Technology, Seoul 130-650, Korea
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Abstract

The probe beam deflection and optical time-of-flight method have been applied to study the dynamics of Nd:YAG laser (266 nm) ablation of pyrolytic boron nitride. Shock wave generation was observed and its velocity was derived by analysis of the acoustic transit time of the acoustic wave produced by laser ablation. The most probable velocities of B and B+ were obtained by optical time-of flight technique. The deposition of boron nitride on silicon substrate by laser ablation was attempted in nitrogen atmosphere. Cubic phase of boron nitride was observed as well as the hexagonal phase.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 397: Symposium B – Advanced laser Processing of Materials-Fundamentals and Applications , 1995 , 265
Copyright
Copyright © Materials Research Society 1996

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References

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