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Properties of Films Prepared from Low Surface Area/Density Alumina-Silica

Published online by Cambridge University Press:  28 February 2011

S.L. Hietala ,
D.M. Smith ,
V.M. Hietala ,
G.C. Frye ,
A.J. Hurd  and
C.J. Brinker
S.L. Hietala
Affiliation:
Unm/Nsf Center For Micro-Engineered Ceramics, University of New Mexico;
D.M. Smith
Affiliation:
Unm/Nsf Center For Micro-Engineered Ceramics, University of New Mexico;
V.M. Hietala
Affiliation:
Sandia National Laboratories, Albuquerque, NM
G.C. Frye
Affiliation:
Sandia National Laboratories, Albuquerque, NM
A.J. Hurd
Affiliation:
Sandia National Laboratories, Albuquerque, NM
C.J. Brinker
Affiliation:
Sandia National Laboratories, Albuquerque, NM
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Abstract

A sol-gel method was used to prepare bulk, closed pore, amorphous alumina-silica. Filmsprepared from this 47wt% A12O3-SiO2 composition were examined by SAW, ellipsometry and electrical measurements. The films were found to have a surface area of 1.1 cm2/cm2, a refractive index of 1.44 at 633 nm, and a relative permittivity of 6.2 at 200 KHz. These properties indicate potential applications as hermetic seals, barrier coatings, dielectric layers for capacitors and passivation coatings for electronic circuits.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 180: Symposium A – Better Ceramics Through Chemistry IV , 1990 , 433
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

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