Hostname: page-component-54dcc4c588-mz6gc Total loading time: 0 Render date: 2025-09-27T11:18:25.319Z Has data issue: false hasContentIssue false
  • English
  • Français

Processing of SiO2-TiO2 Thin Film Waveguides

Published online by Cambridge University Press:  28 February 2011

L. Weisenbach ,
T.L. Davis ,
B.J.J. Zelinski ,
R.L. Roncone  and
L.A. weller-Brophy
L. Weisenbach
Affiliation:
Arizona Materials Laboratories;
T.L. Davis
Affiliation:
Arizona Materials Laboratories;
B.J.J. Zelinski
Affiliation:
Arizona Materials Laboratories;
R.L. Roncone
Affiliation:
Optical Sciences Center; University of Arizona, Tucson, AZ 85721
L.A. weller-Brophy
Affiliation:
Optical Sciences Center; University of Arizona, Tucson, AZ 85721
Get access

Abstract

The shrinkage behavior and changes in refractive index of sol-gel derived SiO2 -TiO2 thin films, with a composition of 50 mole %, were investigated. Two regions of shrinkage rate were observed, a rapid initial stage and a slower second stage. The refractive index of the film was found to be dependent upon the heat treatment. Samples prebaked to 100°C and processed at temperatures below 500°C were found to have lower indices than films processed without prebaking. Films heated to 700°C contained small crystallites of anatase uniformly distributed throughout the film.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 180: Symposium A – Better Ceramics Through Chemistry IV , 1990 , 377
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

REFERENCES

1. Yoldas, B.E. and O'Keeffe, T.W., Appl. Opt. 18(1979) 3133.Google Scholar
2. Brinker, C.J. and Harrington, M.S., Solar Energy Materials, 5(1981)159.Google Scholar
3. Tiefenthaler, K., Briguet, V., Buser, E., Horisberger, M. and Lukosz, W., Proc. SPIE. 401(1983)165.Google Scholar
4. Dale, G.W., Fox, H.H., Zelinski, Brian J.J. and Weller-Brophy, Laura, these proceedings.Google Scholar
5. Roncone, R.L., Weller-Brophy, L.A., and Zelinski, B.J.J., presented at the Feb. 1989 Ultrastructure Conference in Tucson AZ, to be published.Google Scholar
6. Roncone, R.L., Weller-Brophy, L.A., Weisenbach, L. and Zelinski, B.J.J., submitted to the J. Non-Cryst. Solids for publication, July, 1990.Google Scholar
7. Best, M.F. and Condrate, R.A., Sr., J. Mat. Sci. Lett., 4(1985)994.Google Scholar
8. Melpolder, S.M., private communication.Google Scholar
9. Weisenbach, L. and Zelinski, B.J.J., to be published.Google Scholar