Hostname: page-component-745bb68f8f-kw2vx Total loading time: 0 Render date: 2025-02-08T02:27:14.313Z Has data issue: false hasContentIssue false
  • English
  • Français

Preparation and Characterization of Sol-Gel Derived PbTiO3 Thin Layers on GaAs

Published online by Cambridge University Press:  16 February 2011

R. W. Schwartz ,
Z. Xu ,
D. A. Payne ,
T. A. DeTemple  and
M. A. Bradley
R. W. Schwartz
Affiliation:
Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801
Z. Xu
Affiliation:
Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801
D. A. Payne
Affiliation:
Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801
T. A. DeTemple
Affiliation:
Department of Electrical and Computer Engineering, and Center for Compound Semiconductor Microelectronics, University of Illinois at Urbana-Champaign, Urbana, IL 61801
M. A. Bradley
Affiliation:
Department of Electrical and Computer Engineering, and Center for Compound Semiconductor Microelectronics, University of Illinois at Urbana-Champaign, Urbana, IL 61801
Get access

Abstract

PbTiO3 thin layers were deposited onto GaAs by sol-gel processing. The GaAs substrates were encapsulated with Si3N4 or SiO2 to minimize diffusion problems. Gel layers were heat treated to 350°C for removal of organic species and for the densification of the amorphous gel structure. Rapid thermal processing at 600°C was used to crystallize PbTiO3 into the perovskite structure. SIMS analysis determined limited diffusion of Ga and As into PbTiO3. The fine grain microstructure contained domains.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 200: Symposium Y – Ferroelectric Thin Films I , 1990 , 167
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. See for example, Better Ceramics Through Chemistry III, edited by Brinker, C. J., Clark, D. E., and Ulrich, D. R. (Mat. Res. Soc. Proc. 121, Pittsburgh, PA 1988).Google Scholar
2. Keefer, K.D., in Better Ceramics Through Chemistry, edited by Brinker, C. J., Clark, D. E., and Ulrich, D. R. (Mat. Res. Soc. Proc. 32, Pittsburgh, PA 1984) pp. 15–24.Google Scholar
3. Klein, L.C. and Garvey, G. J., in Better Ceramics Through Chemistry, edited by Brinker, C. J., Clark, D. E., and Ulrich, D. R. (Mat. Res. Soc. Proc. 32, Pittsburgh, PA 1984). pp. 33–39.Google Scholar
4. Budd, K.D., Dey, S. K., and Payne, D. A., in Better Ceramics Through Chemistry II, edited by Brinker, C. J., Clark, D. E., and Ulrich, D. R. (Mat. Res. Soc. Proc. 73, Pittsburgh, PA 1986) pp. 711–716.Google Scholar
5. Ashley, C.S., et al., presented at Sol-Gel: Production 0f High Performance Ceramics and Glasses Conference, Gorham Advanced Materials Institute, Marco Island, FL, December 10–12, 1989.Google Scholar
6. Dey, S.K., Budd, K. D., and Payne, D. A., IEEE Trans. UFFC, 35(1), 80 (1988).Google Scholar
7. Fukushima, J., Kodaira, K., and Matsushita, T., J. Mater. Sci., 19, 595 (1984).Google Scholar
8. Lipeles, R.A. and Coleman, D. J., in Sciene of Ceramic Chemical Processing, edited by Hench, L. L. and Ulrich, D. R. (John Wiley & Sons, Inc., New York, 1986) pp. 320–326.Google Scholar
9. Vest, R.W. and Xu, J., Ferroelectrics, 93, 21 (1989).Google Scholar
10. Yi, G., Wu, Z., and Sayer, M., J. Appl. Phys., 64, 2717 (1988).Google Scholar
11. Budd, K.D. and Payne, D. A., Inst. Phys. Conf. Ser., Materials for Non-linear and F, lectro-optics, 103(1), 13 (1989).Google Scholar
12. Brinker, C.J. and Scherer, G. W., in Ultrastructure Processing of Ceramics, Glasses, and Composites. edited by Hench, L. L. and Ulrich, D. R. (John Wiley & Sons, Inc., New York, 1984) pp. 43–59.Google Scholar
13. Pearton, S.J., Cummings, K. D., and VeUa-Coleiro, G. P., J. Electrochem. Soc.: Solid- State Science and Technology, 132(11), 2743 (1985).Google Scholar
14. Mantese, J.V., et al., Appl. Phys. Lett., 52, 1631 (1988).Google Scholar
15. Gurkovich, S.R. and Blum, J. B., in Ultrastructure Processing of Ceramics. Glasses. And Composites, edited by Hench, L. L. and Ulrich, D. R. (John Wiley & Sons, Inc., New York, 1984)pp. 152–160.Google Scholar
16. Budd, K.D., Dey, S. K., and Payne, D. A., Brit. Ceram. Soc., 36, 107 (1985).Google Scholar
17. Ramamurthi, S. and Payne, D. A., accepted for publication in J. Am. Ceram. Soc., (1990).Google Scholar
18. Megaw, H.D., Proc. Phys. Soc., 58, 133 (1946).Google Scholar