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Phase Transitions in Gold Contacts to Gallium Arsenide

Published online by Cambridge University Press:  26 February 2011

Edward Beam  and
D. D. L. Chung
Edward Beam
Affiliation:
Department of Metallurgical Engineering and Materials Science, Carnegie-Mellon University, Pittsburgh, PA 15213
D. D. L. Chung
Affiliation:
Department of Metallurgical Engineering and Materials Science, Carnegie-Mellon University, Pittsburgh, PA 15213
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Abstract

X-ray diffraction was used in situ to study the phase transitions which occurred in 1500 Å Au/GaAs(100) upon heating and cooling. The reaction between Au and GaAs took the form Au + Ga → α Au-Ga. Upon heating, α Au-Ga completely dissolved in liquid Au-Ga. Upon subsequent cooling, β Au-Ga (or Au7Ga2) formed. In 1 atm of nitrogen, phase transitions were observed reversibly at 525 ± 25°C (due to the complete dissolution of α Au-Ga upon heating) and 415 ± 5°C (due to the peritectic transformation of β Au-Ga to α Au-Ga and liquid Au-Ga upon heating). In a vacuum of 425 μ (0.031 Kg/2m) similar phase transitions were observed at 425 ± 25°C and 387 ± 13°C, respectively.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 37: Symposium D – Layered Structures, Epitaxy, and Interfaces , 1984 , 595
Copyright
Copyright © Materials Research Society 1985

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