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Optical-based Flux Monitoring of Atomic Antimony Sources for Molecular Beam Epitaxy

Published online by Cambridge University Press:  15 February 2011

P. D. Brewer  and
K. P. Killeen
P. D. Brewer
Affiliation:
Hughes Research Laboratories, 3011 Malibu Canyon Road, Malibu, CA
K. P. Killeen
Affiliation:
Sandia National Laboratories, Albuquerque, NM
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Abstract

In this paper we discuss the use of optical-based flux monitoring (OFM) for real-time control of atomic antimony fluxes for applications in molecular beam epitaxy. Atomic antimony beams were generated using a two-zone cracking effusion cell. The product distribution of the source was characterized using a time-of-flight mass spectrometer employing resonance-enhanced laser ionization. A double-pass OFM system has been developed to monitor the atomic antimony beam that is capable of precise flux measurement during MBE growth.

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References

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