Published online by Cambridge University Press: 15 February 2011
Results are reported on laser-induced surface modification of 150-400 µm thick free-standing diamond films with excimer lasers under different irradiation regimes, including laser polishing at a grazing beam incidence or ablative etching of the films at the normal beam incidence. Properties of the laser-graphitized layer at the diamond surface were studied with optical spectroscopy techniques in the process of oxidative removal of the layer with increasing temperature of oxidation in ambient air. The optical properties and oxidation stability of the laser-modified surface layer were found to change through its thickness from the surface to the diamond interface, depending on the laser ablation regime.