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A Numerical Simulation of Pulsed Laser Deposition

Published online by Cambridge University Press:  21 February 2011

William T. Laughlin
Affiliation:
Physical Sciences Inc., 20 New England Business Center, Andover, MA 01810
Edmond Y. Lo
Affiliation:
Physical Sciences Inc., 20 New England Business Center, Andover, MA 01810
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Abstract

A numerical simulation of the pulsed laser deposition process has been developed. This model is applied to pulsed laser deposition of carbon, a solid lubricant material. At laser fluences above the ablation threshold, the vapor density and temperature at the substrate are sufficiently high that a continuum flow exists. For typical pulsed laser deposition parameters, plume vapor temperatures and densities are insufficient for significant ionization. However, plume absorption does take place and is regulated by wavelength dependent absorption cross sections of the molecular species. Vapor expansion velocities depend on the absorption of laser radiation and thus the laser wavelength. A simple kinetic theory of deposition predicts the film deposition rate and film thickness profile.

Type
Research Article
Copyright
Copyright © Materials Research Society 1995

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References

References:

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