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New Patternable Materials for Electronic Packaging

Published online by Cambridge University Press:  15 February 2011

Michael Popall ,
Jürgen Kappel ,
Monika Pilz  and
Jochen Schulz
Michael Popall
Affiliation:
Fraunhofer-Institut für Silicatforschung, Neunerplatz 2, D-8700 Würzburg, F. R. G.
Jürgen Kappel
Affiliation:
Fraunhofer-Institut für Silicatforschung, Neunerplatz 2, D-8700 Würzburg, F. R. G.
Monika Pilz
Affiliation:
Fraunhofer-Institut für Silicatforschung, Neunerplatz 2, D-8700 Würzburg, F. R. G.
Jochen Schulz
Affiliation:
Fraunhofer-Institut für Silicatforschung, Neunerplatz 2, D-8700 Würzburg, F. R. G.
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Abstract

New inorganic-organic copolymers (ORMOCERs – ORganically MOdified CERamics) were developed as protective coatings for electronic and optical devices, as patternable insulation and passivation layers for electronics, e. g. MCM's, and as possible interconnects and waveguides for micro optics.

Depending on the chemical composition and the processing parameters, their important features are low permittivity constants (eR ≤ 3.2), high bulk resistance (RD > 1016 Ωcm), high dielectric strength (ED ≤ 400 V/μm), refractive index around 1.48, optical transparency in the range of 400 – 1300 nm, and good adhesion to numerous substrates, such as Al2O3, glass, silicon, copper, aluminum, steel, polyimides, polyesters and epoxides.

The materials can be applied using standard technology. They are patterned by laser direct writing, photolithographic, screen printing or embossing technologies.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 264: Symposium G – Electronic Packaging Materials Science VI , 1992 , 353
Copyright
Copyright © Materials Research Society 1992

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