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Nano Crystalline Diamond Synthesized by Hot Filament Chemical Vapor Deposition

Published online by Cambridge University Press:  01 February 2011

Takayuki Hirai ,
Yoshinori Kanno  and
Yoshiki Takagi
Takayuki Hirai
Affiliation:
g06dhl06@ccn.yamanashi.ac.jp, University of Yamanashi, Human Environment Medical Engineering, 4-4-37 Takeda, Kofu, 400-8510, Japan
Yoshinori Kanno
Affiliation:
kanno@yamanashi.ac.jp, University of Yamanashi, 4-4-37 Takeda, Kofu, 400-8510, Japan
Yoshiki Takagi
Affiliation:
takagi@ntu.ac.jp, Teikyo university of science & technology, 2525 Yatsusawa, Uenohara, 409-0193, Japan
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Abstract

Due to its extreme hardness, chemical and mechanical stability, large band gap and highest thermal conductivity, poly-crystalline diamond is expected to be an excellent packaging material for biomedical and environmental MEMS devices. Recently nano crystalline diamond (NCD) has been synthesized by microwave plasma chemical vapor deposition (MPCVD) technique using a gas mixture of methane-hydrogen or methane-hydrogen and inert gas, argon mixture. Diamond synthesis from liquid carbon source has a relatively high growth rate among various CVD methods. Hot filament chemical vapor deposition (HFCVD) is popular method in order to grow the diamond particles or films. The equipment of HFCVD in present paper is simple and the easy operating. Therefore we tried to NCD synthesis by HFCVD from liquid carbon source such as methanol, ethanol etc. The structure, surface morphology, and grain size of the diamond were examined with field emission scanning electron microscopy (FE-SEM) and Raman spectroscopy. We confirmed our diamond particles as NCD with typical Raman peak of NCD. And we observed 100nm under in diameter with FE-SEM. We will refer to NCD films synthesis by HFCVD in the paper.

Keywords

diamondfilmSi
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 956: Symposium J – Diamond Electronics—Fundamentals to Applications , 2006 , 0956-J09-38
Copyright
Copyright © Materials Research Society 2007

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References

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