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Monolithic Liquid Chemical Sensing Systems

Published online by Cambridge University Press:  01 February 2011

Steven M. Martin ,
Timothy D. Strong  and
Richard B. Brown
Steven M. Martin
Affiliation:
University of Michigan, Ann Arbor, MI 48105, USA Sonetics Ultrasound, Ann Arbor, MI 48103, USA
Timothy D. Strong
Affiliation:
University of Michigan, Ann Arbor, MI 48105, USA Sensicore, Ann Arbor, MI 48108, USA
Richard B. Brown
Affiliation:
University of Michigan, Ann Arbor, MI 48105, USA University of Utah, Salt Lake City, UT 84112, USA
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Abstract

The miniaturization of electrochemical transducers is crucial for the development of implantable biosensors, wearable microdetectors, and remote sensing networks due to the small dimensions required in these applications. As sensors scale, the analytical response degrades and integrated instrumentation is required to maintain acceptable detection limits. This work details the development of CMOS-integrated liquid chemical sensors. The sensors were cost-effectively post-processed on top of foundry-fabricated CMOS electronics using thin-film techniques. CMOS-integrated voltammetric sensors demonstrated a 25x improvement in detection limit/electrode area versus passive sensors. CMOS-integrated, ion-selective electrodes demonstrated a 50x improvement in lifetime and a 200x improvement in response time versus passive sensors. With their improved performance, these smart sensors can be used in a wide range of applications and can additionally serve as enabling technologies for more complex, chip-scale systems.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 869: Symposium D – Materials, Integration and Technology for Monolithic Instruments , 2005 , D3.3
Copyright
Copyright © Materials Research Society 2005

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