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Modification and Reactions of Aluminum Nitride Surfaces

Published online by Cambridge University Press:  25 February 2011

M. Grant Norton ,
T.K. Andrew Yang ,
Paul Kotula ,
Kevin L. Rugg ,
Stuart McKernan  and
C. Barry Carter
M. Grant Norton
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853
T.K. Andrew Yang
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853
Paul Kotula
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853
Kevin L. Rugg
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853
Stuart McKernan
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853
C. Barry Carter
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853
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Abstract

The durability and oxidation behavior of polycrystalline aluminum nitride substrates have been investigated using scanning electron microscopy and x-ray diffraction.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 203: Symposium D – Electronic Packaging Materials Science V , 1990 , 241
Copyright
Copyright © Materials Research Society 1991

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References

REFERENCES

1. Norton, M.G., PhD thesis, University of London (1989)Google Scholar
2. Katnani, A.D. and Papathomas, K.I., J. Vac. Sci. Technol. A5, 1335 (1987)Google Scholar
3. Boch, P. et al. Ceram. Ind. 8, 34 (1982)Google Scholar
4. Billy, M. et al. , Rev. Chimie Min. 19, 673 (1982)Google Scholar
5. Osaka, T. et al. J. Electrochem. Soc. 133, 2345 (1986)Google Scholar
6. Norton, M.G., Summerfelt, S.R. and Carter, C.B., Appl. Phys. Lett. 56, 2246 (1990)Google Scholar
7. McKernan, S., Norton, M.G. and Carter, C.B., Proc. XII Intl. Congress on Electron Microsc. 350 (1990)Google Scholar