Published online by Cambridge University Press: 01 February 2011
Amorphous silicon based solar modules are very attractive for the powering of various microsystems for both indoor and outdoor applications. This technology offers a lot of flexibility in terms of module design, output voltage, shape, size, choice of substrates and offers also the possibility to embed sensors such as photodiodes. This paper focuses on the development of micro-solar modules with area ≤0.15 cm2. Several micro-modules with output voltage of up to 60 V (form 0.1 cm2) were designed and fabricated. The performance limitation introduced by the segment monolithic interconnection and the design of the latter is presented and discussed. An example of a micro-module with a total size of 3.9×3.9 mm2 developed for a micro-robot with dual voltage outputs and embedded photodiodes is also presented.