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Mechanical Properties of Laser Processed Diamond-Like Carbon Films

Published online by Cambridge University Press:  15 February 2011

Ashok Kumar ,
R. B. Inturi ,
Y. Vohra ,
U. Ekanayake ,
N. Shu ,
D. Kjendal ,
G. Wattuhewa  and
J. A. Barnard
Ashok Kumar
Affiliation:
Department of Electrical Engineering, University of South Alabama, Mobile, AL 36688
R. B. Inturi
Affiliation:
Department of Metallurgical and Materials Engineering, University of Alabama, Tuscaloosa, AL 35487-0202
Y. Vohra
Affiliation:
Department of Physics, University of Alabama at Birmingham, Birmingham, AL 35294- 1170
U. Ekanayake
Affiliation:
Department of Electrical Engineering, University of South Alabama, Mobile, AL 36688
N. Shu
Affiliation:
Department of Electrical Engineering, University of South Alabama, Mobile, AL 36688
D. Kjendal
Affiliation:
Department of Electrical Engineering, University of South Alabama, Mobile, AL 36688
G. Wattuhewa
Affiliation:
Department of Electrical Engineering, University of South Alabama, Mobile, AL 36688
J. A. Barnard
Affiliation:
Department of Metallurgical and Materials Engineering, University of Alabama, Tuscaloosa, AL 35487-0202
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Abstract

Diamond-like carbon (DLC) films have a unique combination of physical and chemical properties such as high hardness, optical transparency, low coefficient of friction and chemical inertness. A pulsed laser (248 nm) has been used to ablate a pyrolytic graphite target to deposit DLC films on Si (100) and 7059 Corning glass substrates. The deposition was carried out in high vacuum (≤ 10−6 Torr) at different temperatures ranging from room temperature to 400°C. The films were characterized by x-ray diffraction, scanning electron microscope, and Raman spectroscopie techniques. The mechanical properties (hardness and Young's modulus) of these films were characterized by nanoindentation. We have found that the films deposited at room temperature and 100°C show the characteristic features of DLC films and have the better hardness and modulus properties compared to the films fabricated at higher temperatures, which transform into amorphous carbon. Correlations of pulsed laser deposition process parameters with the properties of deposited DLC films will be discussed in this paper.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 397: Symposium B – Advanced laser Processing of Materials-Fundamentals and Applications , 1995 , 289
Copyright
Copyright © Materials Research Society 1996

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References

REFERENCES

1 Angus, J. C., Koidl, P., and Domitz, S., in Plasma Deposited Thin Films, edited by Mort, J. and Jansen, F. (CRC, Boca Raton, FL, 1986), p. 89.Google Scholar
2 Aisenberg, S. and Kimock, F. M., in Properties and Characterization of Amorphous Carbon Films, Mater. Sci. Forum, edited by Pouch, J. J. and Alterovitz, S. A. (Trans Tech, Zurich) 1990, p. 577.Google Scholar
3 Papas, D. L., Saenger, K. L., Bruley, J., Krakow, W., Cuomo, J. J., Gu, T., and Collins, R. W., J. Appl. Phys. 71, 5687 (1992).Google Scholar
4 Malshe, A. P., Chaudhary, S. M., Kanetkar, S. M., Oagle, S. B., Rajarshi, S. V., and Kshirsagar, S. T., J. Mater. Res. Vol. 4, No. 5, 1238 (1989)Google Scholar
5 Josin, D. L., O'Hren, M. E., McHargue, C. J., Clausing, R. E., and Oliver, W. C., SPIE, Vol. 1050, Infrared Systems and Components III, (1989) p.218 Google Scholar
6 Savvides, N. and Bell, T. J., J. Appl. Phys., 72, (1992) p. 2791 Google Scholar