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Laser Ablation Deposition of Diamond-Like Carbon Films

Published online by Cambridge University Press:  01 January 1992

S. Leppävuori ,
J. Levoska ,
J. Vaara  and
O. Kusmartseva
S. Leppävuori
Affiliation:
University of Oulu, Microelectronics and Material Physics Laboratories, SF-90570 Oulu, Finland
J. Levoska
Affiliation:
University of Oulu, Microelectronics and Material Physics Laboratories, SF-90570 Oulu, Finland
J. Vaara
Affiliation:
University of Oulu, Microelectronics and Material Physics Laboratories, SF-90570 Oulu, Finland
O. Kusmartseva
Affiliation:
University of Oulu, Microelectronics and Material Physics Laboratories, SF-90570 Oulu, Finland
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Abstract

Diamond-like carbon (DLC) thin films were prepared by laser ablation deposition. The deposition process was carried out in a vacuum chamber at a base pressure of about 10−5 mbar using the focused beam from either an Nd:YAG laser or an XeCl excimer laser and a pyrolytic graphite target. The peak power density of the laser beam was about 108 W/cm2, and 1010 W/cm2. respectively. The effect of varying power density of the laser beam also was examined. The films were deposited on fused silica and silicon single crystal substrates between room temperature and 600 °C with and without hydrogen addition. The properties of the films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), micro-Raman and Fourier transform infrared (FTIR) spectrometry, electrical conductivity and optical measurements. The best films were insulating (σ<10−6 Ω−1 cm−1), hard, partly transparent (optical gap 1.3 − 2.2 eV) and smooth without any particulates on the surface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 285: Symposium I – Laser Ablation in Materials Processing–Fundamentals and Applications , 1992 , 557
Copyright
Copyright © Materials Research Society 1993

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References

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