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Kinetics of Reactions Relevant to the Chemical Vapor Deposition of Indium Compounds

Published online by Cambridge University Press:  10 February 2011

M. D. Allendorf  and
A. H. McDaniel
M. D. Allendorf
Affiliation:
Sandia National Laboratories, Livermore, CA 94551–0969, mdallen@sandia.gov
A. H. McDaniel
Affiliation:
Sandia National Laboratories, Livermore, CA 94551–0969, mdallen@sandia.gov
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Abstract

The kinetics of trimethylindium pyrolysis are investigated in a flow reactor equipped with a molecular-beam mass-spectrometric sampling system. Data are analyzed using a new computational approach that accounts for heat and mass transport in the reactor. The measured activation energy, 46.2 kcal mol−1, is in good agreement with previously reported values.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 495: Symposium W – Chemical Aspects of Electronic Ceramics Processing , 1997 , 125
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

1. Jacko, M. G., Price, S. J. W. Can. J. Chem. 42, 1198 (1964).Google Scholar
2. Clark, W. D., Price, S. J. W. Can. J. Chem. 46, 1634 (1968).Google Scholar
3. Buchan, N. I., Jasinski, J. M. J. Cryst. Growth 106, 227 (1990).Google Scholar
4. Larsen, C.A., Stringfellow, G. B. J. Cryst. Growth 75, 247 (1986).Google Scholar
5. Buchan, N. I., Larsen, C. A., Stringfellow, G. B. J. Cryst. Growth 92, 591 (1988).Google Scholar
6. Sugiyama, M., et al. Appl. Surf. Sci. 117/118, 746 (1997).Google Scholar
7. NIST Chemical Kinetics Database, Version 6.0. Google Scholar
8. Jefferson, T. H., “TJMARl-A Fortran Subroutine for Nonlinear Least Squares Prameter Estimation,” Sandia National Laboratories Report, SLL-73–0305, 1973.Google Scholar
9. Coltrin, M. E., et al., “CRESLAF (Version 4.0): A Fortran Program for Modeling Laminar, Chemically Reacting, Boundary-Layer Flow in Cylindrical or Planar Channels,” Sandia National Laboratories Report, SAND93–0478 UC-401, 1996.Google Scholar