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Ion Implantation of Polymers

Published online by Cambridge University Press:  25 February 2011

M.S. Dresselhaus ,
B. Wasserman  and
G.E. Wnek
M.S. Dresselhaus
Affiliation:
Center for Materials Science and Engineering; Department of Electrical Engineering and Computer Science; Department of Physics;
B. Wasserman
Affiliation:
Center for Materials Science and Engineering; Department of Physics;
G.E. Wnek
Affiliation:
Center for Materials Science and Engineering; Department of Materials Science and Engineering;, Massachusetts Institute of Technology, Cambridge, MA 02139, USA

Abstract

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Ion implantation provides a mechanism for radically modifying the electronic and transport properties of a variety of polymers that are normally insulating. By using masks and tailoring the implanted species and ion energies, conducting paths in an insulating medium can be fabricated between specific reference points, an application of obvious relevance to the microelectronics industry. Specific results are reported for modification of the structure, electrical conductivity, thermoelectric-power, optical transmission and electron spin resonance for several polymers under a variety of implantation conditions. The temperature and frequency dependence of the conductivity suggest a onedimensional variable range hopping mechanism for conduction along the polymer chains. Comparison is made between implantation in the 200 keV and 2 MeV energy ranges.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 27: Symposium E – Ion Implantation and Ion Beam Processing of Materials , 1983 , 413
Copyright
Copyright © Materials Research Society 1984

References

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