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Investigation of Surface Ion Failure Mechanisms by Corona Discharge

Published online by Cambridge University Press:  15 February 2011

Robert B. Comizzoli
Robert B. Comizzoli*
Affiliation:
AT&T Bell Laboratories, Murray Hill, New Jersey 07974
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Abstract

In this paper, the use of corona discharges to investigate and monitor surface ion failure mechanisms in devices is reviewed. The physical mechanisms resulting in surface ioninduced failures are first described. Then, some of the traditional design features and testing methods to minimize these failures are summarized. After presenting the general features of surface charge deposition on devices by a corona discharge, several examples of the application of this technique for design verification, process improvement and control, and failure analysis are given.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 225: Symposium G – Materials Reliability Issues in Microelectronics , 1991 , 319
Copyright
Copyright © Materials Research Society 1991

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References

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