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Interfacial Strain-Field in Thin-Film Microstructures

Published online by Cambridge University Press:  10 February 2011

Qun Shen  and
Stefan Kycia
Qun Shen
Affiliation:
Cornell High Energy Synchrotron Source (CHESS), Wilson Laboratory, Cornell University, Ithaca, New York 14853
Stefan Kycia
Affiliation:
Cornell High Energy Synchrotron Source (CHESS), Wilson Laboratory, Cornell University, Ithaca, New York 14853
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Abstract

We present x-ray diffraction analysis of interfacial strain fields in crystalline semiconductor microstructures. In particular we report the observations of diffuse interference fringes, asymmetric grating diffraction patterns, and asymmetric crystal-truncation-rod profiles due to the straw-varying regions in a microstructure. From these diffraction features, both the longitudinal and the transverse strain gradients are determined, in addition to the average stram. These experimental results can be used to interpret other physical properties in microstructures such as band-gap energies and surface morphologies.

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