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Published online by Cambridge University Press: 10 February 2011
In order to maximize the performance of III-Nitride devices, it is necessary to develop thermally stable low resistance Ohmic contacts to III-N based electronic structures. This paper reports on the utility of InN as an aid to contact formation on widegap materials such as InAIN. For n-type materials, several questions relating to the growth conditions have been explored. Specifically, the impact of substrate type (GaAs vs. Sapphire), cap layer growth temperature and V/III ratio on contact resistance has been investigated. It was found that the use of sapphire substrates combined with high growth temperatures (575°C) and high V/III ratios produced acceptable contact resistances (∼10−6Ohm-cm2) to InAIN.
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