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Inhomogeneity and Microstructure in e-Beam Evaporated ZrO2 Films

Published online by Cambridge University Press:  22 February 2011

M. Bellotto ,
C. Cremnonesi ,
F. Parmigiani ,
M. Scagliotti  and
S. Beretta
M. Bellotto
Affiliation:
CISE-Tecnologie Innovative, P.O.Box 12081, 1-20134 Milan, Italy
C. Cremnonesi
Affiliation:
CISE-Tecnologie Innovative, P.O.Box 12081, 1-20134 Milan, Italy
F. Parmigiani
Affiliation:
CISE-Tecnologie Innovative, P.O.Box 12081, 1-20134 Milan, Italy
M. Scagliotti
Affiliation:
CISE-Tecnologie Innovative, P.O.Box 12081, 1-20134 Milan, Italy
S. Beretta
Affiliation:
ALENIA, 1-20014 Nerviano, Italy
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Abstract

Thin films of zirconium dioxide are deposited by e-beam evaporation on optically polished borosilicate crown glass. Two different oxygen partial pressures in the chamber are used. The optical properties of the films are characterized by ellipsometry. The influence of oxygen stoichiometry on the composition and microstructure of the material is investigated by polycrystalline X-ray diffraction for different film thicknesses. The films are found to be inhomogeneous, and a composition gradient (i.e. amorphous ⇔ tetragonal ⇔ monoclinic) is observed from the substrate to the surface. The oxygen partial pressure influences the growth of the films.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 208: Symposium J – Advances in Surface and Thin Film Diffraction , 1990 , 137
Copyright
Copyright © Materials Research Society 1991

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References

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