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Influence of the Shape and Size of ahe Laser Spot on the Spatial Distribution of the Plasma Plume

Published online by Cambridge University Press:  15 February 2011

A. Mele ,
A. Giardini Guidont ,
R. Kelly ,
A. Miotello  and
S. Orlando
A. Mele
Affiliation:
Dipartimento di Chimica, Universita’ di Roma “La Sapienza”, Piazzale Aldo Moro 5, 00185 Rome, Italy
A. Giardini Guidont
Affiliation:
Dipartimento di Chimica, Universita’ di Roma “La Sapienza”, Piazzale Aldo Moro 5, 00185 Rome, Italy
R. Kelly
Affiliation:
Dipartimento di Fisica, Universita’ di Trento, Povo (TN), Italy
A. Miotello
Affiliation:
Dipartimento di Fisica, Universita’ di Trento, Povo (TN), Italy
S. Orlando
Affiliation:
Istituto Materiali Speciali - C.N.R., Tito Scalo (PZ), Italy
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Abstract

Pulsed laser deposition may be accomplished by irradiating a target with a high intensity laser pulse. The flux of particles moving from the target to the substrate obeys gas-dynamic laws when the density of the emitted particles exceeds ∼1 monolayer/(10 ns). The angular distribution of the plume, which depends on various factors, will strongly affect the deposit characteristics. It has been found that an intensified CCD camera can be successfully used to analyze laterally in two orthogonal directions the profile of the expanding plume. A marked influence of laser spot dimension and shape on plume dynamics is observed for laser ablation of a number of materials such as metals, semiconductors and high Tc superconductors.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 397: Symposium B – Advanced laser Processing of Materials-Fundamentals and Applications , 1995 , 87
Copyright
Copyright © Materials Research Society 1996

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References

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